plasma_cleaner
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plasma_cleaner [2020/10/13 16:35] – [Detailed Specifications] furst | plasma_cleaner [2020/10/21 21:41] (current) – [Recipes] dave | ||
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- | ====== Plasma Cleaner PDC-32G====== | + | ====== |
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===== About ===== | ===== About ===== | ||
- | the PDC-32G is a compact table top plasma cleaner for nanoscale surface cleaning and activation of small samples. The attached PlasmaFlo gas mixer allows for quantitative control of up to two different process gasses and monitoring of the vacuumed pressure within the chamber. | + | The Harrick |
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+ | ===== Training Documentation ===== | ||
+ | [[Plasma Cleaner SOP]] | ||
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+ | ---- | ||
===== Detailed Specifications ===== | ===== Detailed Specifications ===== | ||
* 3 stage adjustable RF power settings | * 3 stage adjustable RF power settings | ||
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+ | ===== Recipes ===== | ||
+ | Brian Dincau found that the following recipe does a good job enhancing PDMS-PDMS bonding: | ||
+ | * Power - High | ||
+ | * Pressure - 450 mTorr | ||
+ | * Duration - 30s | ||
+ | * Nitrogen flow - adjust as needed to maintain desired pressure. | ||
===== Safety Concerns ===== | ===== Safety Concerns ===== | ||
- | idk man its plasma seems kinda scary | ||
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===== Reference Documentation ===== | ===== Reference Documentation ===== | ||
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- | ===== Training Documentation ===== | ||
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plasma_cleaner.1602606909.txt.gz · Last modified: 2020/10/13 16:35 by furst