Table of Contents

Harrick Plasma Cleaner PDC-32G

Plasme Cleaner
Tool Type: “Cleaning Tool”
Location: “Microfluidics Lab”
Supervisor Tool Lead
David Bothman “WW Name”
(805) 893-4125 (###) ###-####
bothman@cnsi.ucsb.edu “WW Email”
Description: “TEXT HERE”
Manufacturer: “TEXT HERE”

About

The Harrick PDC-32G is a compact table top plasma cleaner for nanoscale surface cleaning and activation of small samples. The attached PlasmaFlo gas mixer allows for quantitative control of up to two different process gasses and monitoring of the vacuumed pressure within the chamber.


Training Documentation

Plasma Cleaner SOP


Detailed Specifications


Recipes

Brian Dincau found that the following recipe does a good job enhancing PDMS-PDMS bonding:

Safety Concerns


Reference Documentation

harrick-plasma-product-information-web.pdf

plasma_cleaner_manual_32g.pdf

ufl_harrick_plasma_operating_instructions.docx