Table of Contents
Vapor Silanation Rig
| PRIMO |
|---|
 |
| Tool Type: “Vacuum deposition chamber” |
| Location: “Microfluidics Lab” |
| Supervisor | Tool Lead |
| David Bothman | “WW Name” |
| (805) 893-4125 | (###) ###-#### |
| bothman@cnsi.ucsb.edu | “WW Email” |
| Description: “Vapor Silanation Rig” |
| Manufacturer: “TEXT HERE” |
About
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Detailed Specifications
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Safety Concerns
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Operating Procedures
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