plasma_cleaner
Table of Contents
Harrick Plasma Cleaner PDC-32G
| Plasme Cleaner |
|---|
 |
| Tool Type: “Cleaning Tool” |
| Location: “Microfluidics Lab” |
| Supervisor | Tool Lead |
| David Bothman | “WW Name” |
| (805) 893-4125 | (###) ###-#### |
| bothman@cnsi.ucsb.edu | “WW Email” |
| Description: “TEXT HERE” |
| Manufacturer: “TEXT HERE” |
About
The Harrick PDC-32G is a compact table top plasma cleaner for nanoscale surface cleaning and activation of small samples. The attached PlasmaFlo gas mixer allows for quantitative control of up to two different process gasses and monitoring of the vacuumed pressure within the chamber.
Training Documentation
Detailed Specifications
- 3 stage adjustable RF power settings
- Max RF power: 18W
- Chamber size: 3“ diameter x 6.5” Pyrex chamber
- Valve threads: 1/8 NPT
Recipes
Brian Dincau found that the following recipe does a good job enhancing PDMS-PDMS bonding:
- Power - High
- Pressure - 450 mTorr
- Duration - 30s
- Nitrogen flow - adjust as needed to maintain desired pressure.
Safety Concerns
Reference Documentation
plasma_cleaner.txt · Last modified: 2020/10/21 21:41 by dave